Academic Scholarship

Correlation of local structure and electrical activation in arsenic ultrashallow junctions in silicon

Journal of Applied Physics, 104(10), 103716/1- 103716/8, November 2008

Photo Needed Stephen P. Kelty, Ph.D.
Department of Chemistry and Biochemistry
D. Giubertoni, G. Pepponi, S. Gennaro, M. Bersani, M. A. Sahiner, R. Doherty, M. A. Foad, M. Kah, K. J. Kirkby, J. C. Woicik & P. Pianetta

This study aims to correlate between the results of electrical activation measurements and x-ray absorption fine structure measurements.


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