Academic Scholarship

Deactivation of submelt laser annealed arsenic ultrashallow junctions in silicon during subsequent thermal treatment

Journal of Vacuum Science and Technology B, 28(1), C1B1- B5, March 2010

Photo Needed Stephen P. Kelty, Ph.D.
Department of Chemistry and Biochemistry
Mehmet A Sahiner, Ph.D.
Department of Physics
D. Giubertoni, M. G. Pepponi, S. Gennaro, M. Bersani, M. Kah, K.J. Kirkby, R. Doherty, M.A. Foad, F. Meirer, C. Streli, J.C. Woicik & P. Pianetta

In this work, the authors study the deactivation of laser annealed (LA) ultrashallow arsenic distributions in silicon using Hall effect measurements, extended x-ray absorption fine structure spectroscopy, and secondary ion mass spectrometry.


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